Jackson,Mark J <br/><br/>
Micro and Nanomanufacturing 

 - 1st Ed. 
 - New York  Springer Science & Business Media  2007 
 - 699p. 
<br/><br/><label>ISBN: </label>0-387-25874-4 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics Engineering
<br/><br/><label>Dewey Class. No.: </label>620.5  / JA-M